Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1995-08-17
1997-12-16
Dougherty, Thomas M.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310334, 333186, H01L 4108
Patent
active
056989288
ABSTRACT:
An array of thin film piezoelectric resonators are formed on a substrate and connected in parallel to form a single piezoelectric resonator with enhanced piezoelectric coupling. The array includes a first conductive layer positioned on the substrate and defining a first electrode, a plurality of columns of piezoelectric material positioned on the conductive layer and each defining a separate piezoelectric resonator, and a second conductive layer positioned on the plurality of columns and defining a second electrode. The columns are selectively deposited or deposited as a single layer and etched into columns.
REFERENCES:
patent: 2406792 (1946-09-01), Benioff
patent: 4398325 (1983-08-01), Piaget et al.
patent: 4890268 (1989-12-01), Smith et al.
patent: 5030874 (1991-07-01), Saito et al.
patent: 5045746 (1991-09-01), Wersing et al.
patent: 5142187 (1992-08-01), Saito et al.
patent: 5311095 (1994-05-01), Smith et al.
patent: 5432396 (1995-07-01), Sato et al.
"A monolithic surface acoustic wave charge transfer device and its applications" by N.A. Papanicolaou et al. Optical Engineering, Jul./Aug. 1980.
Barker Dean
Mang Luke
Pack Sung P.
Dougherty Thomas M.
Motorola Inc.
Parsons Eugene A.
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