Thin film oxygen sensor

Chemical apparatus and process disinfecting – deodorizing – preser – Analyzer – structured indicator – or manipulative laboratory... – Means for analyzing gas sample

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422 98, 436136, 436137, 73 2331, 73 2332, 324 715, 338 34, 427 78, 4271263, 4271266, 204412, 204425, G01N 2746, G01N 3112

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053975413

ABSTRACT:
An oxygen sensor is based on a thin film of a compound oxide supported on a substrate such as quartz. The compound oxide has a general formula ABO.sub.2.5+x, where A is an element of the lanthanum family, alkaline earth metal or their mixture, and B is a transition metal or a mixture of transition metals. X is a variable number, changing from about 0 to about 0.5 between the reversible oxygen-deplete and oxygen-rich forms of the oxide. In an elevated temperature and oxygen-containing atmosphere, the thin film can undergo reversible bulk oxidation resulting in a detectable change of its physical properties such as mass, optical transmissivity and electrical resistance.

REFERENCES:
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patent: 5071626 (1991-12-01), Tuller
Post, M. L. et al. "Thin Films of Non-Stoichiometric Perovskites as Potential Oxygen Sensors." Sensors and Actuators B, vol. B13, No. 1-3, pp. 272-275 5, 1993.
Warner, J. D. et al. "Laser ablated high T sub c superconducting thin YBa2Cu3O(7-x) films on substrates suitable for microwave applications". Conference on Advances in material science and applications of high temperature superconductors. Greenbelt, Md. (USA) 2-6 Apr. 1990. NTIS, PC AU7/MF A02.
Lal, R et al. "Sensor Activity In Pulsed Laser Deposited and Ion Implanted Tin Oxide Films". Thin Solid Films, 1991, V206, N1-2, Dec. 10, pp. 88-93.

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