Thin film optical waveguide and optical deflecting device

Details Thin film optical waveguide and optical deflecting device Thin film optical waveguide and optical deflecting device

1997-02-25

1998-12-22

Ngo, Hung N.

Optical waveguides

Planar optical waveguide

Thin film optical waveguide

385 37, 385 7, 385 10, 385131, G02B 610

Patent

active

058527028

ABSTRACT:
A thin film waveguide and an optical deflecting device which have a substrate and a waveguide layer. An optical buffer layer which has a refractive index smaller than that of the waveguide layer is provided between the substrate and the waveguide layer, and the optical buffer layer has such a thickness as to make a zero mode guided light beam progressing in the waveguide layer have a propagation loss not more than 2 dB/cm and as to make a first mode guided light beam progressing in the waveguide layer have a propagation loss not less than 4 dB/cm. For example, the waveguide layer is a ZnO thin film, the substrate is a silicon substrate, and the optical buffer layer is a SiO.sub.2 thin film. Further, an interdigital transducer is provided on the waveguide layer to excite Sezawa waves as surface acoustic waves. For example, the waveguide layer is designed to have a thickness which meets the following condition: 1.0<hK<5.0 (K=2 .pi./.LAMBDA.), wherein, h is the thickness of the waveguide layer, and .LAMBDA. is the wavelengths of the Sezawa waves. Furthermore, a conductor film is provided opposite the interdigital transducer with the waveguide layer in-between.

REFERENCES:
patent: 4941722 (1990-07-01), Hatori
patent: 5689362 (1997-11-01), Kadota

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