Thin film multi-layered pyroelectric capacitor

Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive

Reexamination Certificate

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Reexamination Certificate

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07732770

ABSTRACT:
Aspects described herein provide for the design and fabrication of a device with an enhanced pyroelectric response signal comprised of multi-capacitors that are connected in series. These capacitors are fabricated using multi-layers of materials such as lead zirconate titanate (PZT), BaxSr1-xTiO3(barium strontium titanate) and Bi4Ti3O12(bismuth titanate) films that exhibit pyroelectric affect and belong to the class of polar materials. By controlling the poling direction of the multi-layer integrated structure, the pyroelectric voltage can be aligned in one direction, and as a result, the voltage output from the single element is the total contribution from each capacitor.

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Han et al.;Highly a-axis-oriented Nb-doped Pb(TixZr1—x)O3 thin films grown by sol—gel technique for uncooled infrared detectors; Applied Physics Letters; vol. 85, No. 22; Nov. 2004; pp. 5310-5312.
Han et al.;Improved ferroelectric property of LaNiO3/Pb(Zr0.2Ti0.8)O3/LaNiO3 capacitors prepared by chemical solution deposition on platinized silicon; Applied Physics Letters; vol. 88, 092902; Feb. 2006; pp. 1-3.

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