Thin film multi-layer structure and method for manufacturing the

Details Thin film multi-layer structure and method for manufacturing the Thin film multi-layer structure and method for manufacturing the

1995-03-16

1997-04-08

Zimmerman, John

Stock material or miscellaneous articles

All metal or with adjacent metals

Composite; i.e., plural, adjacent, spatially distinct metal...

428686, 428458, 174258, 427 96, 427409, 427536, B32B 1508, H05K 103, H05K 346

Patent

active

056186363

ABSTRACT:
A thin film multi-layer structure includes a plurality of metal thin film layers, and a plurality of layers made of polyimide. The plurality of metal thin film layers and the plurality of layers made of polyimide are stacked in a predetermined order, the plurality of layers made of polyimide being grouped into a first group and a second group including at least a layer located at a top of the plurality of layers. A Young's modulus value of the polyimide of which each layer in the second group is made is less than that of the polyimide of which each layer in the first group is made and a thermal expansion coefficient of the polyimide of which each layer in the first group is made is less than that of the polyimide of which each layer in the second group is made.

REFERENCES:
patent: 4937133 (1990-06-01), Watanabe et al.
patent: 5089355 (1992-02-01), Morita et al.
patent: 5300364 (1994-04-01), Hase et al.

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