Thin film moisture sensing element

Details Thin film moisture sensing element Thin film moisture sensing element

1990-02-21

1991-02-05

Tung, T.

Chemistry: electrical and wave energy

Apparatus

Electrolytic

73335, 733365, 20415322, 204290F, G01N 2726

Patent

active

049902369

ABSTRACT:
A solid state, thin film moisture sensing element is disclosed. The sensing element is fabricated by thin film deposition of at least a pair of two layer electrodes on an insulating surface. The active surface of the element is then coated with a layer of hygroscopic material and placed in a diffusion limiting housing to complete the sensing element assembly.

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patent: 4280885 (1981-07-01), Savery
patent: 4633704 (1987-01-01), Tantram et al.
patent: 4707244 (1987-11-01), Harman, III et al.
patent: 4773935 (1988-09-01), Uda et al.

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