Thin-film microelectromechanical device fabrication process

Details Thin-film microelectromechanical device fabrication process Thin-film microelectromechanical device fabrication process

2007-05-03

2008-03-11

Geyer, Scott B. (Department: 2812)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

C257SE29292

Reexamination Certificate

active

07341884

ABSTRACT:
Processing and systems to create, and resulting products related to, very small-dimension singular, or monolithically arrayed, semiconductor mechanical devices. Processing is laser performed on selected semiconductor material whose internal crystalline structure becomes appropriately changed to establish the desired mechanical properties for a created device.

REFERENCES:
patent: 2003/0015768 (2003-01-01), Bosco et al.

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