Thin-film microcircuits adapted for laser trimming

Details Thin-film microcircuits adapted for laser trimming Thin-film microcircuits adapted for laser trimming

1978-05-30

1980-08-12

Reynolds, B. A.

Electrical resistors

With base extending along resistance element

Resistance element coated on base

29620, 219121LM, 338195, H01C 700, B23K 2600

Patent

active

042175704

ABSTRACT:
Microcircuit structures including thin-film electrical components are provided with a multilayer passivation coating that permits laser trimming of the components through the coating without damaging it. Such a passivation coating suitably includes an underlayer of silicon oxide or other oxygen-containing material and an outer layer of silicon nitride.

REFERENCES:
patent: 3345210 (1967-10-01), Wilson
patent: 3607386 (1971-09-01), Galla et al.
patent: 3996551 (1976-12-01), Croson
patent: 4038517 (1977-07-01), Nelson
patent: 4139833 (1979-02-01), Kirsch
Shibata et al., "New Type Thermal Printing Head Using Thin Film", IEEE Transactions on Parts, Hybrids and Packaging, vol. PHP-12, No. 3, pp. 223-230, Sep., 1976.

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