Thin film magnetic sensor and method of manufacturing the same

Details Thin film magnetic sensor and method of manufacturing the same Thin film magnetic sensor and method of manufacturing the same

2007-01-30

2007-01-30

Lefkowitz, Edward (Department: 2862)

Electricity: measuring and testing

Magnetic

Magnetometers

Reexamination Certificate

active

10853619

ABSTRACT:
A thin film magnetic sensor comprises a pair of thin film yokes each formed of a soft magnetic material, the thin film yokes being arranged to face each other with a gap interposed therebetween; a GMR film electrically connected to the pair of the thin film yokes and having an electrical resistivity higher than that of the soft magnetic material; and an insulating substrate supporting the thin film yokes and the GMR film and formed of an insulating nonmagnetic material. A gap column of a multilayer structure including a layer formed of an insulating nonmagnetic material and a layer of the GMR film is arranged within the gap, and the thickness of the GMR film is uniform over the gap length.

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Related U.S. Appl. No. 10/853,586 (specification including claims and Abstract, pp. 1-74) and 14 sheets of drawings.

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