Thin film magnetic head, process for production thereof

Details Thin film magnetic head, process for production thereof Thin film magnetic head, process for production thereof

1994-06-22

1996-10-22

Powell, William

Etching a substrate: processes

Forming or treating article containing magnetically...

216 41, 216 66, 216 67, 216 76, 252 791, B44C 122

Patent

active

055673333

ABSTRACT:
A magnetic head element has one or more rails formed on the surface thereof. Each rail is formed so as to have a tapered angle of 55.degree.-85.degree.. To form such a rail, ion milling is conducted; the rail substrate used is allowed to have an inclination angle to 15.degree.-60.degree. and is rotated; and there is used, as the ion milling gas, a fluorinated hydrocarbon (e.g. CH.sub.2 FCF.sub.3) gas alone or a mixed gas of said fluorinated hydrocarbon gas and Ar, SF.sub.6 or the like. Accordingly, a magnetic head rail shape gives a small variation in flying height between magnetic head and magnetic disc.

REFERENCES:
patent: 4592801 (1986-06-01), Hara et al.
patent: 5316617 (1994-05-01), Kawabe et al.
patent: 5329689 (1994-07-01), Azuma et al.

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