Thin film magnetic element

Inductor devices – Coil or coil turn supports or spacers – Printed circuit-type coil

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336232, H01F 502

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active

055482651

ABSTRACT:
A thin-film magnetic element is formed of a substrate, a first thin film coil made of a conductive material and formed in a spiral shape on the surface of the substrate parallel thereto, and a second thin-film coil made of a conductive material and formed in a spiral shape on the first thin-film coil parallel to the substrate. The first thin-film coil and the second thin-film coil occupy nearly the same position relative to the substrate surface. Each of the first and second thin film coils changes a line width from an inner circumference to an outer circumference, and a changing ratio of the line width at the first thin film coil is different from that at the second thin film coil. The spiral shapes of the first and second thin-film coils are shifted slightly away from each other in a direction parallel to the substrate surface.

REFERENCES:
patent: 4785345 (1988-11-01), Rawles et al.
patent: 4959631 (1990-09-01), Hasegawa et al.
patent: 4993209 (1990-06-01), Anthony et al.
patent: 5097243 (1992-03-01), Zieren et al.

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