Thin film magnetic device and method of manufacturing the same

Details Thin film magnetic device and method of manufacturing the same Thin film magnetic device and method of manufacturing the same

2011-07-05

2011-07-05

Enad, Elvin G (Department: 2832)

Inductor devices

Coil or coil turn supports or spacers

Printed circuit-type coil

C336S172000, C336S177000, C336S232000, C257S275000, C257S421000, C257S528000, C323S282000

Reexamination Certificate

active

07973630

ABSTRACT:
A thin film magnetic device is provided, in which magnetic permeability in a high frequency range can be easily improved. Scratch-like grooves extending along an extending direction of a coil (for example, a Y-axis direction being an extending direction of a second coil part) are formed at least one side of a surface and a back of each of a lower magnetic film and an upper magnetic film. A magnetization direction of anisotropic magnetization is controlled in each of formation areas of the scratch-like grooves (formation areas of lower magnetic films and upper magnetic films), and therefore displacement (rotation) of the magnetization direction of the anisotropic magnetization is pinned by the scratch-like grooves. Consequently, certain magnetic permeability is kept even in a high frequency range. Moreover, such formation of the scratch-like grooves may not cause complexity in manufacturing process.

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patent: 2002/0048668 (2002-04-01), Inoue
patent: 2004/0111906 (2004-06-01), Abe et al.
patent: A 8-172015 (1996-07-01), None
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patent: 2001143929 (2001-05-01), None
patent: A 2001-143929 (2001-05-01), None

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