Thin film magnet, cylindrical ferromagnetic thin film and produc

Details Thin film magnet, cylindrical ferromagnetic thin film and produc Thin film magnet, cylindrical ferromagnetic thin film and produc

1998-10-15

2000-01-18

Pianalto, Bernard

Coating processes

Magnetic base or coating

Magnetic coating

427128, 427129, 427131, 427250, 4272552, 427294, 427314, 427404, 4274197, 428694R, 428694T, 428694TS, 428704, B05D 512

Patent

active

RE0365173

ABSTRACT:
A thin film magnet and a cylindrical ferromagnetic thin film having a high maximum energy product (greater than 120 kJ/m.sup.3) and thus suitable for use in miniature high performance devices are provided. The thin film magnet is produced by means of physical vapor deposition. The thin film magnet is an (Nd.sub.1-x R.sub.x).sub.y M.sub.1-y-z B.sub.z alloy having a ferromagnetic compound of the Nd.sub.2 Fe.sub.14 B type as its main phase, wherein R is Tb, Ho, and Dy and M is Fe metal or an Fe-based alloy including at least one of Co and Ni, 0.04.ltoreq.x.ltoreq.0.10,0.11.ltoreq.y.ltoreq.0.15, and 0.08.ltoreq.z.ltoreq.0.15. A perpendicular magnetization film having such a composition is deposited on the side wall of a substrate in the columnar (or cylindrical) form thereby obtaining a cylindrical ferromagnetic thin film having radial anisotropy.

REFERENCES:
Cadieu et al, "High.sub.i H.sub.c Perpendicular Anisotrophy Nd-Fe-B Sputtered Films", IEEE Transactions On Magnetics, vol. Mag-22, No. 5, Sep. 1986, pp. 752-754.
Gu et al, "Crystallization Behavior and Magnetic Properties of Amorphous Nd-Fe-B Thin Films", Phys. Stat. Sol. (a) 120, 1990, pp. 159-167 (no month avail.).

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