Thin-film latent open optical detection with template-based feat

Details Thin-film latent open optical detection with template-based feat Thin-film latent open optical detection with template-based feat

1994-02-18

1995-09-05

Mancuso, Joseph

Image analysis

Applications

Manufacturing or product inspection

348126, G06K 900

Patent

active

054486505

ABSTRACT:
Defects and latent defects are detected in connection patterns on a substrate by automated optical testing using bright field illumination and feature extraction template yielding an improved degree of feature discrimination. The feature extraction templates include angularly disposed vectors requiring detection of a predetermined (e.g. foreground) image value with a predetermined distance and a vector angularly interposed between those vectors which requires no detection of the predetermined image value within a distance which is greater than the predetermined distance. Thus, for successful detection of a defect, a portion of one of a set of templates having such a vector condition configuration must be wedged between areas of an image of a surface having the predetermined image values. This technique is implemented on commercially available automated optical inspection tools and results in avoidance of false detections even in the presence of a high density of image artifacts caused by the topologically sensitive bright field illumination employed.

REFERENCES:
patent: 4500202 (1985-02-01), Smyth
patent: 4578810 (1986-03-01), MacFarlane et al.
patent: 4661984 (1987-04-01), Bentley
patent: 4720870 (1988-01-01), Billiotte et al.
patent: 4741044 (1988-04-01), Polomsky et al.
patent: 4745296 (1988-05-01), Driller et al.
patent: 4830497 (1989-05-01), Iwata et al.
patent: 5010578 (1991-04-01), Siener et al.
patent: 5012524 (1991-04-01), Le Beau
patent: 5023917 (1991-06-01), Bose et al.
patent: 5027418 (1991-06-01), Ikegaya et al.
patent: 5046109 (1991-09-01), Fujimori et al.
patent: 5048094 (1991-09-01), Aoyama et al.
patent: 5058178 (1991-10-01), Ray

Affiliated with

Also associated with

Rating

Thin-film latent open optical detection with template-based feat does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thin-film latent open optical detection with template-based feat, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin-film latent open optical detection with template-based feat will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-479590