Thin-film inspection method and device

Details Thin-film inspection method and device Thin-film inspection method and device

2005-09-06

2005-09-06

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S511000, C356S630000

Reexamination Certificate

active

06940604

ABSTRACT:
Disclosed is a thin-film inspection device with two or more light sources. This device can control the wavelength and intensity of light and illuminate the lights with different incident angles, and are used to control the interference intensity, thereby determining optimal inspection conditions to obtain a reliable inspection result even when different kinds of thin films coexist. The thin films are formed on a flat plate and have different indices of refraction and thicknesses. An incident light control unit is disposed between the illumination unit and the flat plate for controlling the light to be incident on the patterns. A sensor unit detects a reflection light from the patterns. A reflection light control unit is disposed between the flat plate and the sensor unit and controls the light to be detected by the sensor unit. A control unit controls the movement of the illumination unit and the sensor unit.

REFERENCES:
patent: 5042949 (1991-08-01), Greenberg et al.
patent: 5333052 (1994-07-01), Finarov
patent: 5502564 (1996-03-01), Ledger
patent: 5936254 (1999-08-01), Aiyer et al.
patent: 6501545 (2002-12-01), Komuro et al.

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