Stock material or miscellaneous articles – Composite – Of inorganic material
Reexamination Certificate
2008-01-01
2008-01-01
Blackwell, G. (Department: 1775)
Stock material or miscellaneous articles
Composite
Of inorganic material
C428S699000, C428S702000
Reexamination Certificate
active
10889686
ABSTRACT:
A cadmium oxide (CdO) film doped with any of the Group III elements is substantially transparent to radiation between about 0.7 μm and 12 μm. A film made according to the invention having a sheet resistance of <600Ω/□ will also have exceptionally low optical absorption throughout the IR range. The film is suitably employed as transparent, electrically conductive electrodes, and can be used in devices such as liquid crystal cells for beam steering, spatial light modulators, optical switches for fiber optical communications, switchable and/or tunable polarization modification components, and top transparent electrodes for SWIR (1.3 and 1.5 μm) VCSELs.
REFERENCES:
patent: 6072117 (2000-06-01), Matsuyama et al.
patent: 6448492 (2002-09-01), Okada et al.
patent: 6761986 (2004-07-01), Cheung
Coutts, TJ et al, “Search for improved transparent conducting oxides: A fundamental investigation of CdO, Cd2SnO4, and Zn2SnO4”, J. Vac. Sci. Technol., A18,(6), p. 2646-2660, (Nov./Dec. 2000).
Baranov, AM. Et al, “Investigation of the properties of CdO films”, Tech. Phys. Ltt. 23,(10), pp. 805-806 (Oct. 1997).
Ferro, R et al.: “F-Doped CdO Thin Films Deposited by Spray Pyrolysis”, PMS. State. Sol. (a) 177, P477, 480-483(2000).
Subramanyam, T.K. et al., “Preparation and characterization of CdO films deposited by dc magnetron reactive sputtering”,Materials Letters, vol. 35, pp. 214-220, (May 1998).
Subramanyam, T.K. et al “Influence of Oxygen Pressure on the Structural and Optical Properties of DC Magnetron Reactive Sputtered Cadmium Oxide Films”, Physica Scripta, vol. 57, p. 317-320, (1998).
Murphy, L.C.S. & Rao, K.S.R.K., “Thickness dependent electrical properties of CdO thin films prepared by spray pyrolysis method”,Bulletin of Material Science, vol. 22, No. 6, pp. 953-957 (Oct. 1999).
Chu, T.L. et al, “Degenerate Cadmium Oxide Films for Electronic Devices”, J. Electronic Materials, vol. 19, No. 9, pp. 1003-1005 (1990).
Tanaka, K. et al., “Electrical and Optical Properties of Sputtered CdO Films”, Japanese Journal of Applied Physics, vol. 8, No. (6), pp. 681-691 (Jun. 1969).
Varkey, A.J. et al., “Transparent conducting cadmium oxide thin films prepared by a solution growth technique”, Thin Solid Films, 239, pp. 211-213 (1994).
Phatak, Girish et al., “Deposition and properties of cadmium oxide films by activated reactive evaporation”, Thin Solid Films, 245, pp. 17-26 (1994).
Shaganov, I.I., et al., “Obtaining transparent oxide conducting coatings by pulsed laser sputtering”, Sov. J. Opt. Technol. 48(5) pp. 280-282 (May 1981).
Minami, Tadatsugu, “New n-Type Transparent Conducting Oxides”, 25, (8), pp. 38-44 (Aug. 2000).
“Pulsed Laser Deposition of Thin Films”, Chrisey, pp. 3, 23-72, 255-263, 327-354, 1994.
“Handbook of Deposition Technologies for Films and Coatings”, Second Edition, Noyes Publications, Bunshah, R.F., pp. 1-2, 167, 187-197, 249-311, 434-456, 320-324, 374-429, 469-471, (1994).
Cheung Jeffrey T.
Gu Dong-Feng
Kobrin Paul H.
Winker Bruce K.
Blackwell G.
Koppel, Patrick, Heybl & Dawson
Teledyne Licensing LLC
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