Thin film hydrogen sensor

Electrical resistors – Resistance value responsive to a condition – Gas – vapor – or moisture absorbing or collecting

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422 90, 73 3105, 338307, 338320, H01C 700

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active

053672836

ABSTRACT:
A hydrogen sensor element comprises an essentially inert, electrically-insulating substrate having a thin-film metallization deposited thereon which forms at least two resistors on the substrate. The metallization comprises a layer of Pd or a Pd alloy for sensing hydrogen and an underlying intermediate metal layer for providing enhanced adhesion of the metallization to the substrate. An essentially inert, electrically insulating, hydrogen impermeable passivation layer covers at least one of the resistors, and at least one of the resistors is left uncovered. The difference in electrical resistances of the covered resistor and the uncovered resistor is related to hydrogen concentration in a gas to which the sensor element is exposed.

REFERENCES:
patent: 3559457 (1971-02-01), Collins
patent: 4624137 (1986-11-01), Johnson et al.
patent: 4931851 (1990-06-01), Sibbald et al.
M. A. Butler and D. S. Ginley, "Hydrogen Sensing with Palladium-Coated Optical Fibers," J. Appl Phys., vol. 64, No. 7, 1 Oct. '88, pp. 3706-3712.
P. A. Michaels, "Design, Development and Prototype Fabrication of an Area Hydrogen Detector (5 Apr. 1963 through 4 Apr. 1964)," Summary Report Submitted to George C. Marshall Space Flight Center, Huntsville, Ala., by The Bendix Corporation, Research Laboratories Div., Southfield, Michigan, Sep. 1964.
P. J. Shaver, "Bimetal Strip Hydrogen Gas Detectors," The Review of Scientific Instruments, vol. 40, No. 7, Jul. 1969, pp. 901-905.

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