Thin-film humidity sensor for measuring the absolute humidity an

Details Thin-film humidity sensor for measuring the absolute humidity an Thin-film humidity sensor for measuring the absolute humidity an

1983-12-22

1985-07-16

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

733365, H01G 520

Patent

active

045300305

ABSTRACT:
A thin-film humidity sensor for measuring the absolute humidity having a base electrode, a moisture-sensitive dielectric layer and a top electrode is formed at the end face of an electrically insulating bushing body by the thin-film technique. The connecting conductors are led through the bushing body and terminate in contact areas which are ground plane and polished together with the end face of the bushing body. The metal layers forming the electrodes are so shaped on application, preferably by means of perforated masks, that they each cover the contact area of the associated connecting conductor and are electrically connected thereto. The bushing body is inserted into a sleeve of a highly alloyed nickel-molybdenum compound and connected thereto in pressure-resistant manner.

REFERENCES:
patent: 2975638 (1961-03-01), Morrison

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