Batteries: thermoelectric and photoelectric – Thermoelectric – Having particular thermoelectric composition
Patent
1994-05-04
1995-12-12
Walsh, Donald P.
Batteries: thermoelectric and photoelectric
Thermoelectric
Having particular thermoelectric composition
136201, 136225, H01L 3520
Patent
active
054746191
ABSTRACT:
A high temperature resistant and corrosion resistant thermoelement for a thermocouple formed of a silicon base layer, a conductive thin film of a silicide of a transition metal such as titanium or molybdenum which is stable at temperatures in the range from 800.degree. C. to at least 1000.degree. C., preferably to at least about 1500.degree. C., and an oxygen diffusion limiting silica overlayer, and a method of forming such a thermoelement by depositing a conductive transition metal silicide film over a silicon base layer and heat treating the film in an oxidizing gas atmosphere having a partial pressure of oxidizing gas sufficient to oxidize silicon atoms from the transition metal silicide to form a continuous SiO.sub.2 overlayer, but insufficient to oxidize transition metal atoms from the transition metal silicide, in which silicon atoms from the transition metal silicide layer which are oxidized to form the SiO.sub.2 overlayer are replaced by silicon atoms from the silicon base layer.
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Carroll Chrisman D.
The United States of America as represented by the Secretary of
Walsh Donald P.
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