Thin film heat treatment apparatus with conductively heated tabl

Details Thin film heat treatment apparatus with conductively heated tabl Thin film heat treatment apparatus with conductively heated tabl

1995-04-03

1997-10-21

Walberg, Teresa J.

Electric resistance heating devices

Heating devices

Radiant heater

219405, 118725, 118728, F27B 510, H01L 2120, C23C 1600

Patent

active

056805020

ABSTRACT:
The thin film heat treatment apparatus for heating the wafers or foil sheets provides a conductively heated table disposed within a vacuum chamber, a heat radiation preventing device that is installed adjacent to the conductively heated table and forms a space with the top of the heater table by surrounding the foil sheet or wafer placed on the top of the heater table.

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patent: 4857704 (1989-08-01), Jannot et al.
patent: 5011794 (1991-04-01), Grim et al.
patent: 5090900 (1992-02-01), Rudolf et al.
patent: 5183402 (1993-02-01), Cooke et al.
patent: 5518593 (1996-05-01), Hosokawa et al.

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