Thin film fuse phase change RAM and manufacturing method

Active solid-state devices (e.g. – transistors – solid-state diode – Bulk effect device – Bulk effect switching in amorphous material

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C257S005000, C257SE45002

Reexamination Certificate

active

07579613

ABSTRACT:
A memory device comprising a first electrode having a top side, a second electrode having a top side and an insulating member between the first electrode and the second electrode. The insulating member has a thickness between the first and second electrodes near the top side of the first electrode and the top side of the second electrode. A bridge of memory material crosses the insulating member, and defines an inter-electrode path between the first and second electrodes across the insulating member. An array of such memory cells is provided. In the array, a plurality of electrode members and insulating members therebetween comprise an electrode layer on an integrated circuit. The bridges of memory material have sub-lithographic dimensions.

REFERENCES:
patent: 3271591 (1966-09-01), Ovshinsky
patent: 3530441 (1970-09-01), Ovshinsky
patent: 4599705 (1986-07-01), Holmberg et al.
patent: 4719594 (1988-01-01), Young et al.
patent: 4876220 (1989-10-01), Mohsen et al.
patent: 4959812 (1990-09-01), Momodomi et al.
patent: 5166096 (1992-11-01), Cote et al.
patent: 5166758 (1992-11-01), Ovshinsky et al.
patent: 5177567 (1993-01-01), Klersy et al.
patent: 5515488 (1996-05-01), Hoppe et al.
patent: 5534712 (1996-07-01), Ovshinsky et al.
patent: 5687112 (1997-11-01), Ovshinsky
patent: 5789277 (1998-08-01), Zahorik et al.
patent: 5789758 (1998-08-01), Reinberg
patent: 5814527 (1998-09-01), Wolstenholme et al.
patent: 5831276 (1998-11-01), Gonzalez et al.
patent: 5837564 (1998-11-01), Sandhu et al.
patent: 5869843 (1999-02-01), Harshfield
patent: 5879955 (1999-03-01), Gonzalez et al.
patent: 5920788 (1999-07-01), Reinberg
patent: 5952671 (1999-09-01), Reinberg et al.
patent: 5970336 (1999-10-01), Wolstenholme et al.
patent: 5985698 (1999-11-01), Gonzalez et al.
patent: 5998244 (1999-12-01), Wolstenholme et al.
patent: 6011725 (2000-01-01), Eitan et al.
patent: 6025220 (2000-02-01), Sandhu
patent: 6031287 (2000-02-01), Harshfield
patent: 6034882 (2000-03-01), Johnson et al.
patent: 6077674 (2000-06-01), Schleifer et al.
patent: 6077729 (2000-06-01), Harshfield
patent: 6087674 (2000-07-01), Ovshinsky et al.
patent: 6104038 (2000-08-01), Gonzalez et al.
patent: 6111264 (2000-08-01), Wolstenholme et al.
patent: 6114713 (2000-09-01), Zahorik
patent: 6117720 (2000-09-01), Harshfield
patent: 6147395 (2000-11-01), Gilgen
patent: 6150253 (2000-11-01), Doan et al.
patent: 6153890 (2000-11-01), Wolstenholme et al.
patent: 6177317 (2001-01-01), Huang et al.
patent: 6185122 (2001-02-01), Johnson et al.
patent: 6189582 (2001-02-01), Reinberg et al.
patent: 6236059 (2001-05-01), Wolstenholme et al.
patent: RE37259 (2001-07-01), Ovshinsky
patent: 6271090 (2001-08-01), Huang et al.
patent: 6280684 (2001-08-01), Yamada et al.
patent: 6287887 (2001-09-01), Gilgen
patent: 6314014 (2001-11-01), Lowrey et al.
patent: 6320786 (2001-11-01), Chang et al.
patent: 6339544 (2002-01-01), Chiang et al.
patent: 6351406 (2002-02-01), Johnson et al.
patent: 6420215 (2002-07-01), Knall et al.
patent: 6420216 (2002-07-01), Clevenger et al.
patent: 6420725 (2002-07-01), Harshfield
patent: 6423621 (2002-07-01), Doan et al.
patent: 6429064 (2002-08-01), Wicker
patent: 6462353 (2002-10-01), Gilgen
patent: 6483736 (2002-11-01), Johnson et al.
patent: 6487114 (2002-11-01), Jong et al.
patent: 6501111 (2002-12-01), Lowrey
patent: 6511867 (2003-01-01), Lowrey et al.
patent: 6512241 (2003-01-01), Lai
patent: 6514788 (2003-02-01), Quinn
patent: 6534781 (2003-03-01), Dennison
patent: 6545903 (2003-04-01), Wu
patent: 6555860 (2003-04-01), Lowrey et al.
patent: 6563156 (2003-05-01), Harshfield
patent: 6566700 (2003-05-01), Xu
patent: 6567293 (2003-05-01), Lowrey et al.
patent: 6579760 (2003-06-01), Lung et al.
patent: 6586761 (2003-07-01), Lowrey
patent: 6589714 (2003-07-01), Maimon et al.
patent: 6593176 (2003-07-01), Dennison
patent: 6597009 (2003-07-01), Wicker
patent: 6605527 (2003-08-01), Dennison et al.
patent: 6605821 (2003-08-01), Lee et al.
patent: 6607974 (2003-08-01), Harshfield
patent: 6613604 (2003-09-01), Maimon et al.
patent: 6617192 (2003-09-01), Lowrey et al.
patent: 6621095 (2003-09-01), Chiang et al.
patent: 6627530 (2003-09-01), Li et al.
patent: 6639849 (2003-10-01), Takahashi et al.
patent: 6673700 (2004-01-01), Dennison et al.
patent: 6744088 (2004-06-01), Dennison
patent: 6791102 (2004-09-01), Johnson et al.
patent: 6797979 (2004-09-01), Chiang et al.
patent: 6805563 (2004-10-01), Ohashi et al.
patent: 6815704 (2004-11-01), Chen
patent: 6859389 (2005-02-01), Idehara et al.
patent: 6861267 (2005-03-01), Xu et al.
patent: 6864500 (2005-03-01), Gilton
patent: 6864503 (2005-03-01), Lung et al.
patent: 6867638 (2005-03-01), Saiki et al.
patent: 6888750 (2005-05-01), Walker et al.
patent: 6894305 (2005-05-01), Yi et al.
patent: 6903362 (2005-06-01), Wyeth et al.
patent: 6909107 (2005-06-01), Rodgers et al.
patent: 6927410 (2005-08-01), Chen
patent: 6933516 (2005-08-01), Xu
patent: 6936840 (2005-08-01), Sun et al.
patent: 6937507 (2005-08-01), Chen
patent: 6992932 (2006-01-01), Cohen et al.
patent: 7023009 (2006-04-01), Kostylev et al.
patent: 7042001 (2006-05-01), Kim et al.
patent: 7067864 (2006-06-01), Nishida et al.
patent: 7067865 (2006-06-01), Lung et al.
patent: 7132675 (2006-11-01), Gilton
patent: 7166533 (2007-01-01), Happ
patent: 7321130 (2008-01-01), Lung et al.
patent: 2001/0055838 (2001-12-01), Walker et al.
patent: 2002/0081833 (2002-06-01), Li et al.
patent: 2005/0093022 (2005-05-01), Lung
patent: 2005/0215009 (2005-09-01), Cho
patent: 2007/0030721 (2007-02-01), Segal et al.
patent: 2007/0224726 (2007-09-01), Chen et al.
patent: WO-00/79539 (2000-12-01), None
patent: WO-01/45108 (2001-06-01), None
Hwang, Y. N. et al., “Full Integration and Reliability Evaluation of Phase-Change RAM Based on 0.24 μm-CMOS Technologies,” 2003 Symposium on VLSI Technology Digest of Technical Papers, pp. 173-174.
Adler, David, “Amorphous-Semiconductor Devices,” Sci. Amer., vol. 236, pp. 36-48, May 1977.
Adler, D. et al., “Threshold Switching in Chalgenid-Glass Thin Films,” J. Appl/Phys 51(6), Jun. 1980, pp. 3289-3309.
Ahn, S.J. et al., “A Highly Manufacturable High Density Phase Change Memory og 64 Mb and Beyond,” IEEE IEDM 2004, pp. 907-910.
Axon Technologies Corporation paper: Technology Description, pp. 1-6, Nov. 2005.
Bedeschi, F. et al., “4-MB MOSFET-Selected Phase-Change Memory Experimental Chip,” IEEE, 2004, 4pp.
Blake thesis, “Investigation of GeTeSb5 Chalcogenide Films for Use as an Analog Memory,”AFIT/GE/ENG/00M-04, Mar. 2000 121 pages.
Chen, et al., “Non-Volatile Resistive Switching for Advanced Memory Applications,” IEEE IEDM, Dec. 5-7, 2005, 4 pp.
Cho, S.L. et al., “Highly Scalable On-axis Confined Cell Structure for High Density PRAM beyond 256Mb,” 2005 Symposium on VLSI Technology Digest of Technical Papers, pp. 96-97.
Gibson, G.A. et al., “Phase-change Recording Medium that Enables Ultrahigh-density Electron-beam Data Storage,” Applied Physics Letter, 2005, 3 pp., vol. 86.
Gill, Manzur et al., “A High-Performance Nonvolatile Memory Technology for Stand-Alone Memory and Embedded Applications,” 2002 IEEE-ISSCC Technical Digest (TD 12.4), 7 pp.
Ha, Y.H. et al., “An Edge Contact Type Cell from Phase Change RAM Featuring Very Low Power Consumtion,” 2003 Symposium on VSLI Technology Digest of Technical Papers, pp. 175-176.
Happ, T.D. et al., “Novel None-Mask Self-Heating Pillar Phase Change Memory,” 2006 Symposium on VLSI Technology, 2 pp.
Haring Bolivar, P. et al., “Lateral Design for Phase Change Random Access Memory Cells with Low-Current Consumption,” presented at 3rd E*PCOS 04 Symposium in Balzers, Principality of the Liechtenstein, Sep. 4-7, 2004, 4 pp.
Horii, H. et al., “A Novel Cell Technology Using N-doped GeSbTe Films for Phase Change RAM,” 2003 Symposium on VLSI Technology Digest of Technical Papers, pp. 177-178.
Hudgens, S. et al., “Overview of Phase-Change Chalcogenide Nonvolatile Memory Technology,&

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Thin film fuse phase change RAM and manufacturing method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thin film fuse phase change RAM and manufacturing method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin film fuse phase change RAM and manufacturing method will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4086692

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.