Thin film forming equipment

Details Thin film forming equipment Thin film forming equipment

1995-07-31

1997-11-04

Fox, John

Valves and valve actuation

With means to increase head and seat contact pressure

Gate valve

251187, F16K 318

Patent

active

056830726

ABSTRACT:
A gate valve for a thin film forming apparatus. The gate valve includes two adjoining low-pressure chambers and a wall separating the two chambers. The wall includes an aperture and a thin plate for covering the aperture. The thin plate is movable in a direction substantially parallel to the plate surface. The gate valve further includes a voltage supply for applying a direct current between the thin plate and the wall.

REFERENCES:
patent: 4313815 (1982-02-01), Graves, Jr. et al.
patent: 4384918 (1983-05-01), Abe
patent: 4547247 (1985-10-01), Warrenback et al.
patent: 4715921 (1987-12-01), Maher et al.
patent: 4747577 (1988-05-01), Dimock
patent: 4756810 (1988-07-01), Lamont, Jr. et al.
patent: 4812712 (1989-03-01), Ohnishi et al.
patent: 4818326 (1989-04-01), Liu et al.
patent: 4824546 (1989-04-01), Ohmi
patent: 4851101 (1989-07-01), Hutchinson
patent: 4897171 (1990-01-01), Ohmi
patent: 4944860 (1990-07-01), Bramhall, Jr. et al.
patent: 5082242 (1992-01-01), Bonne et al.
patent: 5161774 (1992-11-01), Engelsdorf et al.

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