Thin film forming device, thin film forming method, and...

Coating processes – Direct application of electrical – magnetic – wave – or... – Electrostatic charge – field – or force utilized

Reexamination Certificate

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C427S466000, C427S483000, C427S066000, C427S068000, C427S282000

Reexamination Certificate

active

06696105

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a self-light-emitting device in which an EL element having a structure of an anode, a cathode and a light-emitting organic material (hereinafter referred to as an organic EL material) which generates EL (Electro Luminescence) and is sandwiched between them, is formed on an insulator, to an electronic instrument including the self-light-emitting device as a display portion (display or display monitor), to a thin film forming method of the organic EL material, and to a thin film forming device. Note that the self-light-emitting device is also called an OLED (Organic Light-Emitting Diodes).
2. Description of the Related Art
In recent years, a self-light-emitting device (EL display device) using an EL element, as a self-light-emitting element using an EL phenomenon of a self-light-emitting organic material, has been developed. Since the EL display device is a self-light-emitting type, a backlight as in a liquid crystal display device is not necessary, and further, since an angle of visibility is wide, it is considered to be hopeful as a display portion of an electronic instrument.
The EL display device has two kinds, that is, a passive type (simple matrix type) and an active type (active matrix type), and both have been earnestly developed. Especially, at present, attention is paid to an active matrix type EL display device. As an organic EL material which becomes an EL layer regarded as the center of an EL element, although a low molecular organic EL material and a high molecular (polymer) organic EL material are studied, attention is paid to the polymer organic EL material which is easier to handle than the low molecular organic EL material and has high heat resistance.
As a film growth method of the polymer organic EL material, an inkjet method proposed by Seiko Epson Corporation is considered to be promising. With respect to this technique, reference may be made to Japanese Patent Applications Laid-open No. Hei 10-12377, No. Hei 10-153967, No. Hei 11-54270, etc.
However, in the inkjet method, since the polymer organic EL material is jetted out, there can occur a problem of so-called flying deflection in which a droplet is coated on a portion except a necessary portion unless a distance between a coated surface and a nozzle of a head for inkjet is made suitable. The flying deflection is disclosed in detail in Japanese Patent Application Laid-open No. Hei 11-54270, and it is definitely disclosed that there can occur a deviation of 50 &mgr;m or more from a target position to be coated.
SUMMARY OF THE INVENTION
The present invention has been made in view of the above problems, and has an object to provide means for forming a thin film by selectively coating an organic EL material made of polymer for every line or area, not by a spin coating method. Besides, the present invention provides a thin film forming device. Another object of the present invention is to provide a self-light-emitting device using such means and a method of fabricating the same. Still another object of the present invention is to provide an electronic instrument including such a self-light-emitting device as a display portion.
With respect to a coating liquid used for achieving the above objects, a solution is prepared by selecting a solvent with high solubility to an organic EL material. Note that, in the present specification, coating liquid for an EL layer in which the organic EL material is dissolved in the solvent is referred to as the coating liquid.
In the present invention, the coating liquid is contained in a coating liquid chamber, and when it is extracted by an electric field, its flying direction is controlled by an electric field generated by a voltage applied to a mask before it reaches a substrate, and a coating position can be controlled.


REFERENCES:
patent: 3060429 (1962-10-01), Winston
patent: 3147142 (1964-09-01), Rudo
patent: 3416153 (1968-12-01), Hertz et al.
patent: 3596275 (1971-07-01), Sweet
patent: 3747120 (1973-07-01), Stemme
patent: 3946398 (1976-03-01), Kyser et al.
patent: 4226182 (1980-10-01), Danielsen et al.
patent: 4620196 (1986-10-01), Hertz et al.
patent: 5247190 (1993-09-01), Friend et al.
patent: 5264376 (1993-11-01), Abbott et al.
patent: 5344676 (1994-09-01), Kim et al.
patent: 5399502 (1995-03-01), Friend et al.
patent: 5583552 (1996-12-01), Mutoh
patent: 5811020 (1998-09-01), Alwan
patent: 5916729 (1999-06-01), Kobayashi et al.
patent: 5952037 (1999-09-01), Nagayama et al.
patent: 6300021 (2001-10-01), Gorog et al.
patent: 6348359 (2002-02-01), Van Slyke et al.
patent: 6403392 (2002-06-01), Burrows et al.
patent: 2002/0031874 (2002-03-01), Yamazaki et al.
patent: 0 880 303 (1998-11-01), None
patent: 0 892 028 (1999-01-01), None
patent: 10-012377 (1998-01-01), None
patent: 10-092576 (1998-04-01), None
patent: 10-153967 (1998-06-01), None
patent: 11-040358 (1999-02-01), None
patent: 11-054270 (1999-02-01), None
patent: 11-054272 (1999-02-01), None
patent: WO 90/13148 (1990-11-01), None
Sweet, R.G., “High Frequency Recording with Electrostatically Deflected Ink Jets,” The Review of Scientic Instruments, vol. 36, No. 2, pp. 131-136, Feb., 1965.
Pimbley, W.T. et al, “Satellite Droplet Formation in a Liquid Jet,” IBM J. Res. Develop., vol. 21, No. 1, pp. 21-30, Jan., 1977.
Hertz, C.H. et al, “Ink Jet Printing of High Quality Color Images,” Journal of Imaging Technology, vol. 15, No. 3, pp. 141-148, Jine, 1989.
Kimura, M. et al, “Low-Temperature Poly-Si TFT Driven Light-Emitting Polymer Displays and Digital Gray Scale for Uniformity,” IDW '99, pp. 171-174, 1999.
Hunter, I.M. et al, “Design of an Active Matrix Polymer-LED Display with Reduced Horizontal Cross-Talk,” IDW '99, pp. 1095-1096, 1999.
Shimoda, T. et al, “Technology for Active Matrix Light Emitting Polymer Displays,” IDEM 99, pp. 107-110, 1999.
Lee, J.D. et al, “Two-Dimensional Nozzle Arrangement in a Monolithic Inkjet Printhead for High-Resolution and High-Speed Printing,” IDEM 99, pp. 127-130, 1999.
English abstract for Japanese Patent Application No. JP 11-040358.
English abstract for Japanese Patent Application No. JP 11-054270.
English abstract for Japanese Patent Application No. JP 11-054272.
Tsutsui, T. et al, “Electroluminescence in Organic Thin Films,” Photochemical Processes in Organized Molecular Systems, pp. 437-450, 1991.
Baldo, M.A. et al, “Highly Efficient Phosphorescent Emission from Organic Electroluminescent Devices,” Nature, vol. 395, pp. 151-154, Sep. 10, 1998.
Baldo, M.A. et al, “Very High-Efficiency Green Organic Light-Emitting Devices Based on Electrophosphorescence,” Applied Physics Letters, vol. 75, No. 1, pp. 4-6, Jul. 5, 1999.
Schenk, H. et al, “Polymers for Light Emitting Diodes,” EURODISPLAY '99, Proceedings of the 19th International Display Research Conference, Sep. 6-9, 1999, Berlin, Germany, pp. 33-37.
Tsutsui, T. et al, “High Quantum Efficiency in Organic Light-Emitting Devices with Iridium-Complex as a Triplet Emissive Center,” Japanese Journal of Applied Physics, vol. 38, part 2, No. 12B, pp. L1502-L1504, Dec. 15, 1999.
English abstract re Japanese Patent Application No. 10-012377, published Jan. 16, 1998.
English abstract re Japanese Patent Application No. 10-092576, published Apr. 10, 1998.
English abstract re Japanese Patent Application No. 10-153967, published Jun. 9, 1998.
English abstract re Japanese Patent Application No. 11-054270, published Feb. 26, 1999.

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