Thin film forming device

Details Thin film forming device Thin film forming device

1991-04-04

1992-08-25

Nozick, Bernard

Coating apparatus

Gas or vapor deposition

Running length work

C23C 1600

Patent

active

051409380

ABSTRACT:
A physical vapor deposition device having a delivery roller for delivering a substrate, a rotatory drum upon which a magnetic recording layer is formed on the substrate and a wind-up roller which winds up said substrate. The device also has a heating source ahead of the rotatory drum and one or more conveying rollers, wherein one of the conveying rollers is an expander roller which is provided between the delivery roller and the rotatory drum. A thin film forming device uses the expander roller and also has a delivery roller, at least one conveying roller and a wind-up roller.

REFERENCES:
patent: 2709663 (1955-05-01), McLean
patent: 4380211 (1983-04-01), Shnohara

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