Coating apparatus – Projection or spray type – Endless conveyer for work
Patent
1990-08-24
1992-02-11
Wityshyn, Michael
Coating apparatus
Projection or spray type
Endless conveyer for work
118326, 118428, B05B 134, B05C 500
Patent
active
050867270
ABSTRACT:
A thin film forming apparatus which forms a thin film over a surface of a subtrate by spraying a mist of a source solution produced by atomization over the surface of the substrate heated to a given temperature. The film forming apparatus is provided with a pair of guide members for supporting and guiding the substrate at opposite sides of the same. The distance between the opposite inner surfaces of the guide members can be changed according to the width of the substrate to be supported and guided by the pair of guide members. The distance between the respective lower portions of the opposite inner surfaces of the pair of guide members is greater than the distance between the upper portions of the opposite inner surfaces of the same, so that the distribution of the flow rate per unit flow passage area of the mist of the source solution is uniform with respect to the width of the substrate and enables a thin film of a uniform thickness to be formed over the entire surface of the substrate.
REFERENCES:
patent: 3881209 (1975-05-01), Reinitz et al.
patent: 4783006 (1988-11-01), Hayashi et al.
Iida Hideyo
Imai Mizuho
Sekiguchi Mikio
Shiba Nobuyasu
Friedman Charles K.
Taiyo Yuden Co. Ltd.
Wityshyn Michael
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