Thin film forming apparatus, film supplier, film cassette,...

Details Thin film forming apparatus, film supplier, film cassette,... Thin film forming apparatus, film supplier, film cassette,...

2005-03-22

2005-03-22

Lorengo, J. A. (Department: 1734)

Adhesive bonding and miscellaneous chemical manufacture

Surface bonding means and/or assembly means therefor

With work feeding or handling means

C156S358000, C156S381000, C156S556000, C156S580000, C118S045000, C438S758000, C438S778000, C438S780000

Reexamination Certificate

active

06868888

ABSTRACT:
A center robot is fixed approximately in a central portion of a process part. A coating unit, a drying unit, a transfer unit, a peeling unit, a film supplying unit and a reversing unit are arranged around the center robot. The center robot comprises a hand-for-substrate and a hand-for-film which are allowed to directly access the respective units. Within a process part, the center robot transports a sheet film and/or a substrate between the coating unit, the drying unit, the transfer unit and the film supplying unit, and a thin film is formed on the substrate using the sheet film.

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