Thin film forming apparatus

Details Thin film forming apparatus Thin film forming apparatus

2004-11-12

2009-06-02

Koch, III, George R (Department: 1791)

Coating apparatus

Control means responsive to a randomly occurring sensed...

Condition of coated material

C118S666000, C118S695000, C118S708000, C118S712000, C118S713000

Reexamination Certificate

active

07540922

ABSTRACT:
When a solution sprayed by a spray nozzle portion reaches one surface portion of a substrate, a thin film forming material contained the solution decomposes thermally because the substrate is heated to a prescribed temperature, and a thin film is formed on the one surface portion of the substrate. An imaging section obtains a prescribed information on the thickness of a thin film to be formed on one surface portion of the substrate, and a main control section controls a valve section based on the prescribed information from the imaging section. Since, based on the prescribed information on the thickness of a thin film to be formed on one surface portion of the substrate, the main control section allows the spraying nozzle portion to spray the solution therefrom, a thin film of the desired thickness can be formed with high accuracy.

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