Thin film forming apparatus

Details Thin film forming apparatus Thin film forming apparatus

1990-08-24

1991-12-03

Wityshyn, Michael

Coating apparatus

Projection or spray type

Plural projectors

118324, 118326, B05B 134, B05C 500

Patent

active

050691570

ABSTRACT:
A thin film forming apparatus which forms a thin film over the film forming surface of a substrate by spraying a mist of a source solution produced by atomization over the film forming surface of the substrate heated to a given temperature. The substrate conveying direction is reversible, or a nozzle for spouting the mist into a film forming chamber and an exhaust duct are connected removably to a hearth forming the bottom wall of the film forming chamber and can be switched with one another. The film forming apparatus is capable of forming thin films of different laminate constructions.

REFERENCES:
patent: 4750412 (1988-06-01), Itou
patent: 4783006 (1988-11-01), Hayashi et al.

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