Thin-film forming apparatus

Details Thin-film forming apparatus Thin-film forming apparatus

1994-07-01

1998-09-08

Warden, Robert J.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

118301, 118504, C23C 1404

Patent

active

058040463

ABSTRACT:
A collimator having a particle getter function, and a thin-film forming apparatus equipped with the collimator disposed between a target and a wafer. The collimator is fabricated by assembling particle getter sheets into a lattice, honeycomb, or other structure having a number of rows of openings and fixing the assembly into a frame. The particle getter sheets refers collectively to sheets and plates to be assembled integrally to provide a surface having excellent particle capturing and holding actions. Typically, the collimator is a lattice assembly of embossed, slitted particle getter sheets. The film deposited on the collimator is kept from peeling off, without deteriorating the collimator performance.

REFERENCES:
patent: 4988424 (1991-01-01), Woodward et al.
patent: 5099134 (1992-03-01), Hase et al.
patent: 5135629 (1992-08-01), Sawada et al.
patent: 5223108 (1993-06-01), Hurwitt

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