Thin-film formation device and method

Details Thin-film formation device and method Thin-film formation device and method

1997-06-25

1998-08-11

Evans, F. L.

Optics: measuring and testing

With plural diverse test or art

356371, 356381, 25055927, G01B 1106, G01B 1130

Patent

active

057934797

ABSTRACT:
Disclosed is a thin-film formation device which has a light irradiating optical system 13 for irradiating a light of predetermined intensity to the substrate 21 which is subject to film formation, a light detecting optical system 14 for detecting the intensity of the reflected light from the surface of the substrate 21, and a thin-film formation controller 15 which stops the film formation by controlling a material introducing system 11 when the intensity of reflected light takes a maximum value. The device is so arranged that the film formation operation can be stopped when the intensity of reflected light takes a maximum value thereby providing a smoothest thin film.

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