Thin film formation apparatus

Radiation imagery chemistry: process – composition – or product th – Electric or magnetic imagery – e.g. – xerography,... – Process of making radiation-sensitive product

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430132, 4273722, 427387, 423346, G03G 514

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active

051224313

ABSTRACT:
A hydrogenated amorphous silicon carbide material is used as the surface protecting layer for a photosensitive member of an electrophotographic apparatus. The carbon content (x) of the hydrogenated amorphous silicon carbide material, expressed by the general formula a--Si.sub.1-x C.sub.x :H, ranges from 0.4 to 0.6, and the composition is such that the ratio of the peak TO amplitude appearing in the vicinity of 480 cm.sup.-1 to the peak TA amplitude appearing in the vicinity of 150 cm.sup.-1, both as observed by laser Raman spectroscope measurement using an excitation laser of Ar.sup.+ 488nm, is 2.0 or higher. Such material does not exhibit blurring of the image even when exposed to high humidity conditions.

REFERENCES:
patent: 4532199 (1985-07-01), Ueno et al.
patent: 4777103 (1988-10-01), No et al.
patent: 4818563 (1989-04-01), Ishihara et al.

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