Thin-film, flat panel, pixelated detector array for real-time di

Radiant energy – Invisible radiant energy responsive electric signalling – Semiconductor system

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25037011, 25037014, G01T 124

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active

052626490

ABSTRACT:
A thin-film, flat panel, pixelated detector array serving as a real-time digital imager and dosimeter for diagnostic or megavoltage X rays or gamma rays, including a plurality of photodiodes made of hydrogenated amorphous silicon arrayed in columns and rows upon a glass substrate. Each photodiode is connected to a thin film field effect transistor also located upon the glass or quartz substrate. Upper and lower metal contacts are located below and above the photodiodes to provide the photodiodes with a reverse bias. The capacitance of each photodiode when multiplied by the resistance of the field effect transistor to which it is connected yields an RC time constant, .tau..sub.RC, sufficiently small to allow fluoroscopic or radiographic imaging in real time. Specifically, ##EQU1## where P=the pixel-pixel pitch in .mu.m, where .about.25.ltoreq.p.ltoreq..about.10,000,

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