Thin film filter having negative temperature drift coefficient

Details Thin film filter having negative temperature drift coefficient Thin film filter having negative temperature drift coefficient

2011-01-25

2011-01-25

Speer, Timothy M (Department: 1784)

Food or edible material: processes, compositions, and products

Processes

Extraction utilizing liquid as extracting medium

C428S701000

Reexamination Certificate

active

07875305

ABSTRACT:
A structure of a film filter includes a plurality of film layers made of a film stack material and a substrate wafer which said film layers are deposited on at a temperature substantially higher than a room temperature and retained to after being cooled to the room temperature. The substrate wafer has a coefficient of thermal expansion greater than that of the film stack material so as to generate compressive forces upon the associated film layers, thus resulting in the film filter having a negative temperature drift coefficient.

REFERENCES:
patent: 5648115 (1997-07-01), Bandyopadhyay et al.
patent: 5843518 (1998-12-01), Li et al.
patent: 6049169 (2000-04-01), Gibson et al.
patent: 6995101 (2006-02-01), Zou et al.
patent: 2002/0080833 (2002-06-01), Matsuura et al.

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