Thin film elastic wave resonator

Details Thin film elastic wave resonator Thin film elastic wave resonator

2005-12-06

2010-02-23

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S189000, C310S366000

Reexamination Certificate

active

07667558

ABSTRACT:
An upper electrode (50) includes a first electrode (51) formed in a circle and a second electrode (52) formed in an annulus outside the first electrode (51). The first electrode (51) and the second electrode (52) are electrically separated from each other via an insulating region. A lower electrode (30) includes a third electrode (31) formed in a circle and a fourth electrode (32) formed in an annulus outside of the third electrode (31). Similarly, the third electrode (31) and the fourth electrode (32) are electrically separated from each other via an insulating region. Further, the third electrode (31)is provided so as to face the first electrode (51) via the piezoelectric body (40) and the fourth electrode (32) is provided to face the second electrode (52) via the piezoelectric body (40), respectively.

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