Thin film EL device with protective film

Details Thin film EL device with protective film Thin film EL device with protective film

1991-05-14

1991-12-10

Mintel, William

357 54, 357 72, 357 52, 357 71, H01L 3300

Patent

active

050722638

ABSTRACT:
A thin-film EL device of which the surface is coated with a protective film of a two-layer structure consisting of an insulating film (10) and a metallic film (20) in order to obtain good air-tightness and high reliability. The insulating film (10) consists of any one of a silicon oxide film, a silicon nitride film, an aluminum oxide film or a tantalum oxide film, and the metallic film consists of a thin film of either aluminum or tantalum.

REFERENCES:
patent: 4613546 (1986-09-01), Kuwata et al.
patent: 4714951 (1987-12-01), Bavorant et al.
patent: 4891684 (1990-01-01), Nishioka et al.
Halstead, "Corrosion Protection by Aluminum Anodization," IBM Technical Disclosure Bulletin, vol. 20, No. 10, Mar. 1978, pp. 3849-3850.

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