Thin film dielectric storage target and method for making same

Gas separation: apparatus – Electric field separation apparatus – Electrode cleaner – apparatus part flusher – discharger – or...

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9645, 156 3, 156 8, 15618, 20424, 31395, 42747, 42731, H01J 3148

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active

039605620

ABSTRACT:
A membrane type dielectric storage target formed from a thin refractory dielectric film is stretched to form at least a one-sided surface, a first surface portion contacting a conductive wire mesh, a second surface portion having areas coated with conductive material imaging the mesh of the first surface portion. The method contemplates forming the conductive image on the second surface portion by photo-resist, decoration, and breakdown techniques.

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