Metal working – Method of mechanical manufacture – Electrical device making
Patent
1987-12-10
1989-03-07
Eley, Timothy V.
Metal working
Method of mechanical manufacture
Electrical device making
29620, 29829, 296101, 346140R, H01C 1706, H05K 300
Patent
active
048094285
ABSTRACT:
A process for manufacturing a thin film resistor substrate useful, for example, in fabricating an ink jet printhead, wherein discontinuous strips of conductive material are initially patterned on the surface of a resistive layer. These strips are formed using a first series of masking and etching steps of define an "X" dimension of a resistive heater element. Then, the conductive strips and resistive material therebetween are completely masked in preparation for a subsequent, second etching step used to remove the exposed portions of the resistive layer and thereby define a "Y" dimension of the resistive heater element. These steps leave smooth contours, good step coverage and high quality bevelled edges of the thus defined conductive and resistive layers. These layers are now ready for subsequent passivation layer, barrier layer and orifice plate deposition processes to complete a thin film printhead for use in an ink jet printer.
REFERENCES:
patent: 4446355 (1984-05-01), Sato et al.
patent: 4683646 (1987-08-01), Kando et al.
patent: 4695853 (1987-09-01), Hackleman et al.
Aden James S.
Kahn Jeffrey A.
Bethurum William J.
Eley Timothy V.
Hewlett--Packard Company
Ross Taylor J.
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