Thin film detector of ultraviolet radiation, with high spectral

Details Thin film detector of ultraviolet radiation, with high spectral Thin film detector of ultraviolet radiation, with high spectral

1996-01-18

1997-10-28

Tokar, Michael J.

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

25037001, 257 55, 257 56, 257 62, 257 63, 257458, 257 53, 257 77, H01L 2714

Patent

active

056820372

ABSTRACT:
Thin film detector of ultraviolet radiation with high spectral selectivity option, and a structure placed between two electrodes, formed by the superposition of semiconductor thin films such as hydrogenated amorphous silicon and its alloys with carbon. The device is able to absorb a large quantity of UV radiation and to convert it into electric current being transparent to photons of longer wavelengths. Its deposition technique allows fabrication on substrates of glass, plastic, metal, ceramic types of materials (also opaque, also flexible), on which a conductor material film has been predeposited. It can be fabricated on substrates of any size.

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