Thin film deposition method and gas sensor made by the method

Details Thin film deposition method and gas sensor made by the method Thin film deposition method and gas sensor made by the method

1997-03-07

1998-10-13

Williams, Hezron E.

Measuring and testing

Gas analysis

With compensation detail

73 3106, 422 90, 422 98, H01L 2358, G01N 2712

Patent

active

058214020

ABSTRACT:
A gas sensor including a substrate, a heater formed on said substrate, and a gas sensing material to be heated by said heater, wherein the area of the substrate under the heater is removed or reduced in its thickness to form a cavity. The thickness of the layer of the gas sensing material is reduced gradually toward the peripheral of the gas sensing material.

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