Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to condition of coating material
Reexamination Certificate
2001-02-26
2009-02-03
Zervigon, Rudy (Department: 1792)
Coating apparatus
Control means responsive to a randomly occurring sensed...
Responsive to condition of coating material
C118S688000, C118S690000, C118S691000, C118S726000, C156S345240, C156S345250, C156S345260
Reexamination Certificate
active
07485189
ABSTRACT:
This invention provides a thin film deposition process making it possible to form a thin film having a desired composition with good reproducibility and high efficiency; a thin film deposition device therefore; a FTIR gas analyzer used in the thin film deposition process; and a mixed gas supplying device used in the thin film deposition process. The thin film deposition process comprises the steps of mixing a plurality of organic metal gases in a gas mixing chamber and supplying the mixed gas into a reaction chamber to deposit a thin film on a substrate positioned in the reaction chamber, wherein the mixture ratio between/among the organic metal gases supplied into the gas mixing chamber is measured with a FTIR gas analyzer fitted to either the gas mixing chamber or the reaction chamber and then on the basis of results of the measurement, the flow rates of the organic metal gases are individually adjusted.
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Funakubo Hiroshi
Satake Tsukasa
Tominaga Koji
Horiba Ltd.
Zervigon Rudy
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