Thin-film crystal-structure-processed mechanical devices,...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having moving solid-liquid-solid region

Reexamination Certificate

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C117S044000, C117S045000, C117S953000, C117S003000, C117S004000, C117S047000, C117S046000

Reexamination Certificate

active

07128783

ABSTRACT:
Thin-film laser-effected internal crystalline structure modified materials suitable for the creation of various small-dimension mechanical devices, either singly or in monolithic arrays, such as MEMS devices. Processing is carried out at room temperature and atmospheric pressure.

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