Thin-film conductor and method of fabricating the same

Details Thin-film conductor and method of fabricating the same Thin-film conductor and method of fabricating the same

1993-04-27

1996-12-17

Turner, Archene

Stock material or miscellaneous articles

Structurally defined web or sheet

Including components having same physical characteristic in...

428336, 428697, 428701, 428702, H01L 3900

Patent

active

055851673

ABSTRACT:
A thin-film conductor is made of (Sr.sub.1-y Ca.sub.y).sub.1-x CuO.sub.z, wherein 0.ltoreq.x.ltoreq.0.1 and 0.ltoreq.y.ltoreq.0.5, and z is approximately equal to or smaller than 2. In a method of fabricating the thin-film conductor, it is preferably to heat a substrate. A first atomic layer of metal including Sr or including Sr and Ca is formed on the heated substrate. A second atomic layer of oxide containing Cu is formed on the first atomic layer. A first atomic layer of metal including Sr or including Sr and Ca is formed on the second atomic layer. These steps are repeated to form a lamination of an alternation of the first atomic layers and the second atomic layers on the substrate.

REFERENCES:
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