Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate
2005-03-29
2005-03-29
Gurley, Lynne A. (Department: 2812)
Semiconductor device manufacturing: process
Having magnetic or ferroelectric component
C438S238000, C438S381000, C438S669000, C438S670000, C438S671000, C257S421000, C257S531000, C257S528000
Reexamination Certificate
active
06872579
ABSTRACT:
A method of forming a patterned thin film comprises the steps of forming a first plating layer and a second plating layer. Each of the steps of forming the plating layers includes: the step of forming a coating film by applying a liquid resist to the layer below; the heat processing step of forming a resist layer by performing heat processing on the coating film; the step of forming a frame by patterning the resist layer; and the step of forming the plating layer by plating through the use of the frame. Each of sublayers includes: a first portion having a sidewall and encased in a groove of the frame; and the second portion extending out of the groove. The second portion has overhang portions that overhang and extend more outward than the sidewall of the first portion.
REFERENCES:
patent: 3853715 (1974-12-01), Romankiw
patent: 5824599 (1998-10-01), Schacham-Diamand et al.
patent: 5976967 (1999-11-01), Wu
patent: 6081021 (2000-06-01), Gambino et al.
patent: 6143641 (2000-11-01), Kitch
patent: 6245670 (2001-06-01), Cheung et al.
patent: 6252290 (2001-06-01), Quek et al.
patent: 6255217 (2001-07-01), Agnello et al.
patent: 6261950 (2001-07-01), Tobben et al.
patent: 6284642 (2001-09-01), Liu et al.
patent: 6287961 (2001-09-01), Liu et al.
patent: 6329211 (2001-12-01), Terunuma et al.
patent: 6333557 (2001-12-01), Sullivan
patent: 6372661 (2002-04-01), Lin et al.
patent: 6558516 (2003-05-01), Kamijima
patent: 6611035 (2003-08-01), Inoue
patent: 6673633 (2004-01-01), Sasaki
patent: 6771463 (2004-08-01), Kamijima
patent: 6780738 (2004-08-01), Kamijima
patent: 6812543 (2004-11-01), Kamijima
patent: 20020109168 (2002-08-01), Kim et al.
patent: B-56-36706 (1981-08-01), None
patent: 02123511 (1990-05-01), None
patent: A-8-330736 (1996-12-01), None
Gurley Lynne A.
TDK Corporation
LandOfFree
Thin-film coil and method of forming same does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Thin-film coil and method of forming same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin-film coil and method of forming same will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3436447