Thin-film coating apparatus

Details Thin-film coating apparatus Thin-film coating apparatus

1984-05-25

1989-09-19

Shaver, Kevin P.

Dispensing

Drip, leakage or waste catching or disposal

118 52, 118302, 141 87, 141 90, 222148, 222420, 239112, B05B 1502, B65D 4718, B67D 108, B67D 116

Patent

active

048673455

ABSTRACT:
A thin-film coating apparatus for forming a metal oxide film or diffusion source film on the surface of materials to be treated. The apparatus includes a solution-dropping nozzle device including an inner tube adapted to cause a solution to flow down therethrough and an outer tube enclosing the inner tube. The inner wall of the outer tube is spaced from the outer wall of the inner tube so as to define a flow path therebetween, the flow path being adapted to supply a cleaning solution to the tip portion of the inner tube. Because the tip portion of the inner tube can be cleaned efficiently, any concentration or deposition of the dropping solution is prevented from occurring at the tip portion of the inner tube.

REFERENCES:
patent: 400358 (1889-03-01), Page
patent: 2874734 (1959-02-01), Luckock et al.
patent: 3601162 (1971-08-01), Page
patent: 4350187 (1982-09-01), Trusselle et al.
patent: 4365585 (1982-12-01), Naylor et al.
patent: 4416213 (1983-11-01), Sakiya
IBM Technical Disclosure Bulletin, vol. 17 No. 11 Apr. 1975, Holihan et al.

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