Thin-film coating apparatus

Details Thin-film coating apparatus Thin-film coating apparatus

1988-09-16

1990-07-17

Silverberg, Sam

Coating apparatus

With means to centrifuge work

118 50, B05C 1302

Patent

active

049414267

ABSTRACT:
A thin-film coating apparatus rotates a member on which a coating solution is dropped to spread the coating solution over the member. The thin-film coating apparatus comprises a spinner for securely supporting the member, a casing firmly attached to the spinner in surrounding relation to the spinner and the member, and a lid for closing an opening in the casing through which the member can be brought into and out of the casing, thereby defining a closed processing chamber in the casing.

REFERENCES:
patent: 4108109 (1978-08-01), Barger
patent: 4393807 (1983-07-01), Fujimura
IBM Tech. Disclosure Bulletin, vol. 20, No. 11, 3/78, 4082-3.
IBM Tech. Disclosure Bulletin, vol. 16, No. 6, 11/73, 1730.

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