Thin film capacitors and method of making the same

Details Thin film capacitors and method of making the same Thin film capacitors and method of making the same

1985-12-23

1986-12-23

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

29 2542, 427 79, H01G 3075, H01G 101, H01G 410

Patent

active

046316337

ABSTRACT:
A thin film capacitor is formed of a thin crystalline electrically insulative or semiconductive substrate. With the insulative substrate a thin conductive metal layer is deposited on the substrate and a thin film of a crystalline strontium barium niobate deposited on the thin conductive metal layer so that its 2.77.ANG. spaced atomic planes are oriented in a non-perpendicular manner to the substrate and an additional thin conductive layer is deposited on the surface of the strontium barium niobate film. When a semiconductive substrate is employed the strontium barium niobate film is deposited directly on the substrate. These capacitors exhibit a low temperature coefficient of capacitance and a high capacitance density.

REFERENCES:
patent: 3279947 (1966-10-01), Kaiser
patent: 3326718 (1967-06-01), Dill
patent: 3470018 (1969-09-01), Smith et al.
patent: 3819990 (1974-06-01), Hayashi et al.
patent: 4038167 (1977-07-01), Young

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