Metal working – Electric condenser making – Solid dielectric type
Patent
1997-05-30
1999-05-04
Scherbel, David A.
Metal working
Electric condenser making
Solid dielectric type
H01G 700
Patent
active
058989820
ABSTRACT:
The present invention comprises capacitors, and methods of manufacturing the same, having a plurality of vertical plates formed on a substrate in a manner so as to have a high capacitance in a small space and to have good time and temperature stability. Vertical plates are initially formed as sidewall electrode depositions to pedestals formed on a substrate, and through a series of processing steps, additional vertical plates are formed so that multiple capacitor plate--dielectric--capacitor plate combinations are formed around each of the initial vertical plates. Exemplary embodiments and methods of fabrication are disclosed.
REFERENCES:
patent: 5126916 (1992-06-01), Tseng
patent: 5550077 (1996-08-01), Tseng et al.
patent: 5566045 (1996-10-01), Summerfelt et al.
patent: 5573967 (1996-11-01), Tseng
patent: 5574621 (1996-11-01), Sakamoto et al.
patent: 5595926 (1997-01-01), Tseng
patent: 5616511 (1997-04-01), Hirota
patent: 5618745 (1997-04-01), Kita
patent: 5712759 (1998-01-01), Saenger et al.
Metzler Richard A.
Rodov Vladimir
Halpern Benjamin
Luminous Intent, Inc.
Scherbel David A.
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