Thin film capacitors

Details Thin film capacitors Thin film capacitors

1997-05-30

1999-05-04

Scherbel, David A.

Metal working

Electric condenser making

Solid dielectric type

H01G 700

Patent

active

058989820

ABSTRACT:
The present invention comprises capacitors, and methods of manufacturing the same, having a plurality of vertical plates formed on a substrate in a manner so as to have a high capacitance in a small space and to have good time and temperature stability. Vertical plates are initially formed as sidewall electrode depositions to pedestals formed on a substrate, and through a series of processing steps, additional vertical plates are formed so that multiple capacitor plate--dielectric--capacitor plate combinations are formed around each of the initial vertical plates. Exemplary embodiments and methods of fabrication are disclosed.

REFERENCES:
patent: 5126916 (1992-06-01), Tseng
patent: 5550077 (1996-08-01), Tseng et al.
patent: 5566045 (1996-10-01), Summerfelt et al.
patent: 5573967 (1996-11-01), Tseng
patent: 5574621 (1996-11-01), Sakamoto et al.
patent: 5595926 (1997-01-01), Tseng
patent: 5616511 (1997-04-01), Hirota
patent: 5618745 (1997-04-01), Kita
patent: 5712759 (1998-01-01), Saenger et al.

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