Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Reexamination Certificate
2011-01-18
2011-01-18
Thomas, Eric (Department: 2835)
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
C029S025420
Reexamination Certificate
active
07872853
ABSTRACT:
There is disclosed a thin film capacitor and the like capable of suppressing fluctuations of a capacity, increasing a VBD, and accordingly improving a device. characteristic and reliability of a product. In electronic components1to4, a capacitor11is formed on a flat substrate51as a base material including a planarization layer52formed on the surface thereof. The capacitor11has a structure in which a lower conductor21constituted of an underlayer conductor21aand a conductor21b, a dielectric film31made of alumina or the like, a resin layer J1mainly formed of a novolak resin or the like, a resin layer J2mainly formed of a polyimide resin or the like, and an upper conductor25constituted of an underlayer conductor25aand a conductor25bare formed on the planarization layer52of the substrate51. The resin layer J1has an opening K1above the lower conductor21, and the resin layer J2is provided with an opening K2opened more widely than the opening K1.
REFERENCES:
patent: 5736448 (1998-04-01), Saia et al.
patent: 2003/0139016 (2003-07-01), Watanabe et al.
patent: A-11-074467 (1999-03-01), None
patent: A-2001-015928 (2001-01-01), None
patent: A-2006-005293 (2006-01-01), None
patent: WO 02/089161 (2002-11-01), None
patent: WO 2007/010681 (2007-01-01), None
Oliff & Berridg,e PLC
TDK Corporation
Thomas Eric
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