Thin film capacitor and method of manufacturing the same

Details Thin film capacitor and method of manufacturing the same Thin film capacitor and method of manufacturing the same

2007-07-31

2007-07-31

Ha, Nguyen T. (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S321100, C361S321400, C361S303000, C361S305000, C361S311000, C361S313000

Reexamination Certificate

active

10940605

ABSTRACT:
A semiconductor device having the thin film capacitor includes a first electrode formed on a substrate, a capacitor insulating film containing a laminated film, which is constructed by laminating an amorphous dielectric film and a polycrystalline dielectric film via a wave-like interface, on the first electrode, and a second electrode formed on the capacitor insulating film.

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