Thin film capacitor and method for manufacturing the same

Details Thin film capacitor and method for manufacturing the same Thin film capacitor and method for manufacturing the same

2008-03-25

2008-03-25

Ha, Nguyen T. (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S321100, C361S311000, C361S313000, C361S306100, C361S306300, C257S295000, C257S296000

Reexamination Certificate

active

11580872

ABSTRACT:
The present invention provides the steps of (a) forming a first electrode on a substrate via an adhesion enhancing layer, (b) forming a capacitor insulating film containing a laminated film, in which an amorphous dielectric film and a polycrystalline dielectric film are laminated via a wave-like interface, by forming sequentially and successively the amorphous dielectric film and the polycrystalline dielectric film made of same material on the first electrode, (c) forming a second electrode on the capacitor insulating film, and (d) a step of annealing the capacitor insulating film in an oxygen atmosphere.

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Japanese Office Action dated Oct. 3, 2006 issued in corresponding to Application No. JP2002-083315.

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